KDT120
Vacuum / Cleanroom XY stages
782433:006.26
High-resolution titanium XY Scanning Stage
UHV, DUV / EUV, ISO 4, Travel 24 x 24 mm, Aperture 62 x 62 mm, Rep 0.03 µm, Load 0.5 kg, Speed 3 mm/s
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Fields of application
Precision positioning for laboratory applications, membrane-integrated microfluidics, organ-on-a-chip applications, mounting, fixing, alignment, assembly of multi-well plates and membrane chips, research in ultra-high vacuum and under extreme ultraviolet radiation, sample preparation, sample scanning, sample handling, biochips
| KDT120 | -24-PM-L | ||
| Travel | [mm] | 24 x 24 | |
| Repeatability unidirectional | [µm] | ± 0.03 | |
| Repeatability bidirectional | [µm] | ± 0.05 | |
| Positioning speed | [mm/s] | 2.5 | |
| Max. speed | [mm/s] | 3.75 | |
| Max. load Fx | [N] | 5 | |
| Max. load Fy | [N] | 5 | |
| Max. load Fz | [N] | 45 | |
| Length | [mm] | 155 | |
| Width | [mm] | 120 | |
| Height | [mm] | 25 | |
| Aperture | [mm] | 62 x 62 | |
| Lubrication liquid | [mbar] | up to 10-8 | |
| Lubrication dry | [mbar] | up to 10-11 | |
| Max. Bakeout temperature | [deg] | 120 | |
| Motor | Piezo Motor | ||
| Bearing | cross roller bearings stainless steel, hybrid, optional full ceramic | ||
| Feedback | Linear Scale | ||
| Resolution Measuring system | 0.1 µm, optional up to 0.005 µm | ||
| Optional features | custom fluorine-free / PFAS-free UHV lubrication, adapter, bore grid, cable / plugs | ||
| Variants clean room | up to clean room class ISO 4 (higher on request) | ||
| Variants beam | UV, DUV, EUV (X-ray, gamma on request) | ||
| Variants Magnetism | magnetic, low-magnetic, magnet-free | ||
| Variants vacuum | all ranges up to 10E-11 mbar HV / UHV | ||
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
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