XY Stages
Our high precision XY stages are universal in use and their operating parameters correspond with the most important requirements in metrology and test engineering.
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Precision XY stage with 385 mm travel, aperture 400 mm, 0.3 µm repeatability, 22 kg load
Precision XY stage with 200 mm travel, 1.3 µm repeatability, 30 kg load for variable and moving…
Heavy duty stage with up to 155 mm travel, aperture 170 mm, 0.5 µm repeatability, 20 kg load
Stages for cleanroom and vacuum applications
Even more stage for your clean room and vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar and clean room class ISO 6 - or even better - available. Click here for the overview of our vacuum and clean room stages!
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