Wafer and chip inspection / measurement

For you we find customized solutions for non-contact optical inspection of wafers, probe cards, dies and microchip components. For this purpose, we offer systems for layer thickness measurement, contact inspection, electrical characterization, probe head positioning, sample manipulation and metrology of wafer microstructures in the nanometer range.

Custom Positioning Systems

XYZ Positioning System for wafer inspection up to 12 inch / 300 mm (cleanroom ISO 6) | travel 305 x 305 x 200 mm — XYZ Positioning System for wafer inspection up to 12 inch / 300 mm (cleanroom ISO 6) |… Modular XYZ positioning system for wafer...

Double XYZ wafer positioner for scanners, microscopes and wafers up to 12 inch / 300 mm (clean room ISO2) | Stroke 720 x 720 x 100 mm — Double XYZ wafer positioner for scanners, microscopes and wafers up to 12 inch / 300 mm… High throughput screening of wafers up to 12" The...

XYZ Positioning System for wafer inspection up to 12 inch / 300 mm (cleanroom ISO 6) | travel 305 x 305 x 200 mm — XYZ Positioning System for wafer inspection up to 12 inch / 300 mm (cleanroom ISO 6) |… Modular XYZ positioning system for wafer...

XYZ positioning system for optical inspection of wafers, PCBs, probe cards (clean room) | Stroke 200 x 200 mm — XYZ positioning system for optical inspection of wafers, PCBs, probe cards (clean room) |… Highly stable non-contact optical measurement....

6-axis semiconductor inspection positioning system (clean room class ISO 4) | travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360° — 6-axis semiconductor inspection positioning system (clean room class ISO 4) | travel XYZ 30… 6-axis positioning for semiconductors This 6-axis...

XYZ positioning system for automated inline wafer inspection e.g. layer thickness measurement | Stroke 650 x 650 x 100 mm — XYZ positioning system for automated inline wafer inspection e.g. layer thickness… Automated XYZ inline wafer inspection with large...

XYZ positioning system for automated inspection - wafer / probe cards (clean room) | Stroke 720 x 720 x 100 mm — XYZ positioning system for automated inspection - wafer / probe cards (clean room) |… High-precision quality inspection for cleanroom...

XYZ positioning system for inspection & metrology by laser, optics e.g. solar cells, wafers | Stroke 1200 x 1400 x 200 mm — XYZ positioning system for inspection & metrology by laser, optics e.g. solar cells, wafers… µm-accurate positioning and nanometer stability...

XYZ Inspection gantry for semiconductors | XY Linear motor, profile rail | Z Ball screw, AC… High precision automatic 3D inspection of...

X Phi positioning system for inspection of wafers, biological samples (clean room ISO 5) | rotary axis and linear stage — X Phi positioning system for inspection of wafers, biological samples (clean room ISO 5) |… High-precision linear-rotatory positioning This X...

XYZ Phi inspection system suitable for 12 inch wafers, printed circuit boards (clean room ISO 2) — XYZ Phi inspection system suitable for 12 inch wafers, printed circuit boards (clean room… Universal 4-axis granite gantry with cleanroom...

Inspection System for Solar Wafers — Inspection System for Solar Wafers A KT310 form our standard program was combined...

Multi Axes Systems

MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10 mm Rx Ry 4° | High Loads up to 10 kg — MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod… Cardan on XY Stage with aperture This XY Phi Delta...

MP210-3 XYZ Positioning System, temperature stable 0 - 40°C | DC Motor, Lead Screw, Linear Scale | Aperture 150 mm / 5" | Travel 25 x 25 x 25 mm — MP210-3 XYZ Positioning System, temperature stable 0 - 40°C | DC Motor, Lead Screw, Linear… Compact XYZ stage for samples up to 5" This XYZ...

6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) | Tripod, Rotary Stage, XY- Stage, Hexapod Alternative | Travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360° — 6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) | Tripod, Rotary… 6-axis alignment of wafers and optics up to 12"...

MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5° — MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg |… Surface aligner with stepper motor and ball screw...

XYZ Universal Gantry | XY Linear Motor, Air Bearing | Z Ball Screw, DC Motor, Cross Roller | Stroke 600 x 600 x 100 mm — XYZ Universal Gantry | XY Linear Motor, Air Bearing | Z Ball Screw, DC Motor, Cross Roller… Universal XYZ positioning system for precise...

XYZ Multi-axis gantry system | XY linear motor, profile rail | Z ball screw, AC servo |… High-speed multi-axis gantry system This versatile...

XY-2Z 4-Axis Gantry with aperture | XY linear motor, profile rail, air bearing | Z ball… Gantry with aperture and bilateral sensor...

XYZ AFM gantry for wafer inspection, microscopy | travel up to 550 x 1550 mm | air bearing, ball screw, belt, stepper motor — XYZ AFM gantry for wafer inspection, microscopy | travel up to 550 x 1550 mm | air bearing,… Highly stable AFM air bearing gantry with large...

XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail… Precise and highly dynamic for samples up to 150...

XY-Z-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile… Precise and highly dynamic for samples up to 150...

XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail… High-precision positioning for samples up to 150...

Standard Axes & Stages

PLT165-SM - — PLT165-SM Linear stage with a width of just 165 mm and an...

PMT160-DC - — PMT160-DC High precision linear stage with a width of 160...

PMT160-SM - — PMT160-SM High precision linear stage with 160 mm width....

KT470-SM - — KT470-SM Flat precision XY stage with 300 mm travel, 2.3 µm...

KT405-EDLM - — KT405-EDLM Precision XY scanning stage with 320 mm travel,...

DT200-DC - Inspection and Mikroscopy — DT200-DC Rotary stage with very flat design. For this...

Vacuum / Cleanroom

MT53 — MT53 Miniature linear stage 53 x 53 x 20 mm, HV / UHV /...

MT130 — MT130 EUV miniature linear stage 155 x 130 x 43 mm, UHV...

LT300 — LT300 Precise high load linear stage HV / UHV / EUV, ISO...

LA170 — LA170 Precise high load XYZ linear axis HV / UHV / EUV,...

LA97 — LA97 Nanometer linear stage HV / UHV up to 10E-11, 100...

LA95 — LA95 Precision linear stage HV / UHV / UV / DUV, ISO 4,...

DT155 — DT155 High-resolution rotary stage with large aperture...

HDT255 — HDT255 Aperture lifting stage UHV, DUV / EUV, ISO 6,...

KDT310-SM-HV — KDT310-SM-HV Heavy load XY scanning stage HV, DUV, Cleanroom...

KT106/170 — KT106/170 XY Sample Stage HV / UV / DUV, ISO 4, Travel 136 x...

KDT105 — KDT105 High resolution XY scanning stage HV / UHV / EUV,...

KT105 — KT105 High resolution XY stage HV / UHV / EUV, 50 mm...

LA85 — LA85 Focus linear stage HV / DUV, cleanroom ISO 6,...

LA80 — LA80 High speed linear stage HV / UHV / EUV, ISO 4, 200...

DT230-SM — DT230-SM High-resolution, stable aperture rotary stage UHV,...

LA80-2LA95 — LA80-2LA95 Fast 3-axis UHV system LA80-LA90 UV / UHV / EUV,...

3LT300 - Vacuum / Cleanroom Multi Axes Systems — 3LT300 XYZ manipulator Three axes manipulator for ultra...

Ball & Lead Screw Drives

KGT 1112 - — KGT 1112 Nut with connecting thread, 4-point-contact and...

KGT 1214 - — KGT 1214 Cylindrical nut with 4-point-contact and internal...

GGT M4x1P0.5 - — GGT M4x1P0.5 Cleanroom ISO3, up to 10E-11 mbar, length 112 mm,...

KGT 1412 - — KGT 1412 Flange single nut with 4-point-contact with...

KGT 1510 - — KGT 1510 Spring preloaded double nut with 2-point-contact...

KGT 2422 - — KGT 2422 Flange single nut with 4-point-contact with...

KGT ETA+ - — KGT ETA+ Energy-efficient ETA+ ball screws with reduced...

KGT 1416 - — KGT 1416 Einzelmutter mit 4-Punkt-Kontakt ...

KGT 2412 - — KGT 2412 Flange single nut with 4-point-contact with...

EUV know-how

Material selection, nanometer coating, suitable lubricants / lubricant-free, cleaning

up to 10 million cycles

Air bearings, lifetime tests, integrated maintenance concepts / maintenance-free

5 Nanometer

And even higher precision for all XYZ-Rx-Ry-Rz motions

Individual customization and development of your Innovaiton

Optimal positioning solution for your application with a fast and free 3D design

Design of functional samples, prototypes up to series production

Integrated development of your mechanics, electronics and software

Series production of your innovation on > 3.900 m² production area
~~more about the technical specifications~~

Customization to your specific process requirements

Cleanroom systems up to Class 1

On more than 100 m² of cleanroom space, we exclusively manufacture high-precision and particle-free state-of-the-art technology for cleanroom systems up to ISO 14644-1 Class 1.

More on series development

Vacuum standard axes up to 10^-12

Our high-precision modular vacuum stages for linear, lifting, rotary and XYZ positioning have proven themselves over decades. They withstand the most extreme life tests with 24/7 operation.

Go to Vacuum Standard axes

Individual life cycle tests

We implement your life cycle tests for you at our numerous universal test stands for various individual test scenarios in our measurement laboratories.

More about test and measurement

Are you looking for a technical solution for your application?

Elger Matthes
Development, Consulting, Concepts, Innovationn

T +49 (0) 351 88585-0

Nadine Strudel
Consulting International

T +49 (0) 351 88585-44

Our references