Parallel kinematic planar stage

To transfer objects from an automatic transportation apparatus to a handling station is a common task. The „delivery accuracy“of the transportation device is often insufficient for the requirements of the following process step. Moreover, the geometrical characteristics of the objects differ.

By means of sensors e.g. image processing systems, deviations can be reliably identified and correction coordinates calculated.

The FMD 3DOF stage allows a fast and precise linear correction movement in X- and Y- direction as well as in the rotational movement about Z-axis.

With 3 independent direct linear drives, each equipped with a high-resolution absolute measuring system, the object is  kinematically manipulated and rotated to the desired target position.

The object slide is the only moving part. It „floats“ on an air film of a few microns free from wear and is only kept in position by the force of the actuators.

Due to the direct drives, air bearings, and non-contact optical measuring systems, the system operates:

-    without wear
-    without lubricants
-    without moving cables and tubes
-    without particle generation

And by lowering the air bearings, the object is locked in the target position energy-free.
 
The correcting movements are max. ±1mm (linear) and ±1 deg (angular). The system is designed for a load of 10-20kg, and the linear measuring systems have a resolution of 0,25µm.