Lifting stage HT 160
| Technical Data |
|||
| 16-LM | -16-DC | ||
| Travel | [mm] | 16 | 16 |
| Accuracy | [μm] | ±2 | ±10 |
| Resolution | [nm] | 33 |
depending on encoder |
| Vertical force/displacement ratio |
1:3 | 1:3 | |
| Relative deviation from straightness/flatness - over total length |
[μm] |
± 2 |
± 2 |
| Max. speed* | [mm/s] | 20 | 50 |
| Max. acceleration* | [m/s2] | 2 | 0.5 |
| Permissible loads |
Fz [N] |
15 |
50 |
| Weight | [kg] | 4 | 4.5 |
| Abbreviations | |
| Drive | |
| DC | DC motor |
| SM | stepping motor |
| PM | PiezoLEG |
| LM | piezo linear motor |
| EDLM | synchronous ironless linear motor |
| Measurement system | |
| R | rotary encoder |
| L | incremental linear encoder |
| W | incremental angular encoder |
| Optional accessories | |
| MM | integrated motion controller |
| B | integrated electromagnetic brake |