Micro Stage MT 84
| Technical Data MT84 |
|||||
| -25-PM | -50-PM | -25-LM | -50-LM | ||
| Travel | [mm] | 25 |
50 | 25 | 50 |
| Accuracy | [µm] | 3 (1 on request) |
3 (1 on request) |
3 (1 on request) |
3 (1 on request) |
| Repeatability | [counts] | ± 2 |
± 2 |
± 6* |
± 6* |
| Relative deviation from straightness/flatness - over total length |
[µm] |
± 0.5 |
± 0.5 |
± 1 |
± 2 |
| Max. speed |
[mm/s] |
5 |
5 |
250* |
250* |
| Max. acceleration |
[m/s2] | > 10* | > 10* | ||
| Permissible loads |
Fx [N] Fy [N] Fz [N] |
5 20 20 |
5 20 20 |
5 20 20 |
5 20 20 |
| Weight | [kg] | 0.6 | 0.75 | 0.6 | 0.75 |
| Abbreviation | |
| Drive | |
| DC | DC-Motor |
| SM | Stepper motor |
| PM | PiezoLEG |
| LM | Piezo Linear motor |
| Measuring System | |
| R | Rotary encoder |
| L | Linear encoder |
| W | Angular encoder |
| optional accessories | |
| MM | Integrated controller |
| B | Integrated brake |