Micro Stage MT 63, MP 63
| Technical Data |
||
| MT 63-25-DC | ||
| Travel | [mm] | 25 |
| Accuracy | [μm] | 5 |
| Repeatability* | [μm] | ± 1 |
| Backlash | [μm] | 5 |
|
Relative deviation |
[μm] |
± 3 (± 1 on request) |
| Max. Speed | [mm/s] | 3.5 |
| Permissible loads * | Fx [N] Fy [N] Fz [N] |
20 20 20 |
| Weight | [kg] | 0.269 |
* consult factory for vertical operation
| Abbreviation | |
| Drive | |
| DC | DC-Motor |
| SM | Stepper motor |
| PM | PiezoLEG |
| LM | Piezo Linear motor |
| Measuring System | |
| R | Rotary encoder |
| L | Linear encoder |
| W | Angular encoder |
| optional accessories | |
| MM | Integrated controller |
| B | Integrated brake |