Micro Stage MT 53
| Technical Data |
||
| MT 53-10-PM | ||
| Travel | [mm] | 10 |
| Accuracy | [µm] | 3 |
| Repeatability * | [counts] | ± 2 |
| Relative deviation from straightness/flatness - over total length |
[µm] | ± 0.5 |
| Max. Speed | [mm/s] | 5 |
| Permissible loads | Fx [N] Fy [N] Fz [N] |
5 20 20 |
| Weight | [g] | app. 100 |
* depending on duty cycle and load
| Abbreviations | |
| Drive | |
| DC | DC motor |
| SM | stepping motor |
| PM | PiezoLEG |
| LM | piezo linear motor |
| EDLM | synchronous ironless linear motor |
| Measurement system | |
| R | rotary encoder |
| L | incremental linear encoder |
| W | incremental angular encoder |
| Optional accessories | |
| MM | integrated motion controller |
| B | integrated electromagnetic brake |