Non-Magnetic Application
Demand for non-magnetic stages has increased steadily over the past years. Such systems are used in life science applications as well as microelectronics and nanotechnology. Depending on the nature of the application, the motion system’s magnetic field must either be very weak so it does not interfere with measurements taken in the outside magnetic field, or the system is subjected to very strong outside magnetic fields, and non-magnetic properties of the stage are necessary to keep the forces generated inside the system low enough to ensure proper operation within specification.
Applications requiring very low system-inherent magnetism (<1 mG):
- Ion beam lithography
- Electron beam lithography
- Electron beam inspection
- Electron microscopy
Applications with high magnetic fields:
- Material inspection
- Magnetic resonance imaging
FMD has production proven expertise in supplying precision motion systems with demanding specifications in hostile environments. Materials used include stainless steel, titanium, titanium with ceramics, or solid ceramics. Powered by special piezo linear motors FMD’s motion systems can be custom tailored to meet the most stringent requirements.
Device in ion beam equipment
Test configuration in a high and static magnetic field
Slit device in an accelerator