Patented Solutions

Adjustable baseplate 

Test assembly for stage measurements

Measuring tasks with high requirements for flatness with low yaw and tilt values.

• achievable flatness:
  0,3 µm over 100 mm
• achievable yaw: ± 15 µrad
• achievable tilt:  ± 15 µrad

Dual Speed  

Dual speed system

The production proven precision measuring stage series PMT160 was modified for special applications in laser technology and metrology. The innovation “DUAL-SPEED MODE” includes an assembly of 2 motors powering the same ball screw driven axis. For high speed a standard DC-Motor is used that can reach 50…120mm/s depending on the screw pitch. Due to the relatively poor slow speed dynamic range of a DC-Motor, positioning in the nanometer range is not possible. In order to achieve very low speeds and nanometer steps a rotary piezo drive is switched in. The motion control is executed by a modified standard controller.