Semiconductor Application

Feinmess Dresden offers technology and innovative design for various positioning applications in the semiconductor technology. Our solutions are used in: 

• Wafer inspection
• Wafer scanning
• Electron beam processing
• Back-end processing

All mechanical components (drives, bearings, structure) meet the requirements that are given by the clean room classes ISO 1 and 2. We offer travels up to 1000 mm and our systems carry loads up to 30kg with highest precision, dynamic and continuous operation. Required life time tests ensure the reliable usage in highly sensitive environments, and we offer technological solutions for extreme environments (EUV, nitrogen atmosphere).